发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF |
摘要 |
A FET (40) is formed ona Si-substrate (1) producing storage cells. The transistor has a gate electrode (8) and interruption sites (9a,9b). The gate electrode is separated by a gate insulating film on the substrate (1). . Zones (9a,9b) are formed at a distance from each other by the gate electrode between them in the substrate (1). A polysilicon layer (3) i.e. an LT-molten cpd. is in electrical contact with the site (9a). The polysilicon layer (3) is formed in such a way that it extends over the separating oxide film (10). A specific switching circuit zone i.e. storage cells, is in the intermediate layer - insulating film (2) on which a wiring layer (4) of aluminium is connected to the polysilicon layer (3). The wiring layers (4) are covered by a protective film (6). A connecting part (L) which can be melted by replacing the redundant switching circuit and removed, is formed on the zones in the polysilicon layer (3). USE/ADVANTAGE - Semiconductor devices such as SRAMs and DRAMs can be produced, in which predetermined joint sections are uninterrupted and defective switching circuits blocks are replaced by replacement blocks of open-loop-formation type. |
申请公布号 |
KR950001753(B1) |
申请公布日期 |
1995.02.28 |
申请号 |
KR19910003064 |
申请日期 |
1991.02.26 |
申请人 |
MITSUBISHI ELECTRIC CORP. |
发明人 |
MODONAMI, KAORU;NAKATOMO, MASAO |
分类号 |
H01L21/82;H01L21/66;H01L23/525;H01L23/528;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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