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发明名称
Method for fabricating semi-conductor device
摘要
申请公布号
GB9426147(D0)
申请公布日期
1995.02.22
申请号
GB19940026147
申请日期
1994.12.23
申请人
NEC CORPORATION
发明人
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/3213
主分类号
H01L21/28
代理机构
代理人
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