MICROSTRUCTURE BODY FOR VIBRATION GYROSCOPE

摘要

PURPOSE: To provide an improved vibration gyroscope and its microstructure. CONSTITUTION: A microstructure 50 for a vibration gyroscope 10 has a ring 14 supported in the state of being vibrated in the radial direction with a substantially undamped high Q value. The ring 14 is conductive and has a charge plate, and plural radially positioned charge conductive areas 13 are disposed in the periphery of the ring to sense the radial displacement of the ring. The ring 14, the support 15 and the charge conductive areas 13 are formed on the surface of a common silicon substrate 30 having a single integrated circuit in a mold.