| 摘要 |
PURPOSE:To accurately adjust the position and posture by supporting a cylinder fixed with an optical element using three linear guides for each plane which are provided on the periphery along with the two planes vertical to the axis of a short pipe for vacuum, and operating the linear guides outside of the vacuum. CONSTITUTION:Three linear guides 2 are fixed at each of two locations of circumference 3 of a short pipe 1 rotation-symmetrically in the plane vertical to the axis of a holder short pipe 1 and a cylinder 6 containing a Walter mirror 5 is supported with 6 in-total linear guides 2. Then two upper linear guides 2 are loosen to remove from the cylinder 6, the tip position of 4 lower linear guides 2 are adjusted and the cylinder 6 and the Walter mirror 5 are moved to an arbitrary direction vertical to the short pipe 1 axis. And the posture of the cylinder 6 and the Walter mirror are changed to direct to an arbitrary direction. By this method, the position and posture of the optical element is easily adjusted with high accuracy, the adjustment does not deviate during the use and is hardly affected by vibration.
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