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发明名称
SEMICONDUCTOR ELEMENT SEPARATION DEVICE
摘要
申请公布号
JPH06349867(A)
申请公布日期
1994.12.22
申请号
JP19930139692
申请日期
1993.06.11
申请人
FUJI ELECTRIC CO LTD
发明人
AIDA TAKEHARU
分类号
B65G47/14;H01L21/52;H01L21/677;H01L21/68;(IPC1-7):H01L21/52
主分类号
B65G47/14
代理机构
代理人
主权项
地址
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