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发明名称
ION SOURCE
摘要
申请公布号
JPH06349434(A)
申请公布日期
1994.12.22
申请号
JP19930138330
申请日期
1993.06.10
申请人
NISSIN ELECTRIC CO LTD
发明人
HIKAWA KAZUNORI;TANJIYOU MASAYASU
分类号
H01J27/02;H01J37/08;(IPC1-7):H01J37/08
主分类号
H01J27/02
代理机构
代理人
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