| 摘要 |
PURPOSE:To satisfactorily restore an infinitesimal change on the surface of an object, where an S/N is considerably low, by improving the S/N in an SEM image within a range without generating signal distortion and restoring the infinitesimal change by the separate processing concerning any arbitrary area. CONSTITUTION:This method is composed of a step S1 for inputting the SEM image, step S2 for A/D converting the SEM image, step S3 for performing smoothing processing of image data, steps S5 and S6 for additively averaging the smoothed image data, step S7 for designating the arbitrary area from the surface of image data after the additive average processing, step S8 for emphasizing an image inside the designated area and step S9 for integrating the image data of the image emphasized area into the smoothing processed and additively average processed image data and since the image data emphasized by the step S8 are combined with the smoothing and additively average processed image data, the image of the area, where a dynamic range is infinitesimal, are restored at the high S/N. |
