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发明名称
WIRE-TYPE SAW
摘要
申请公布号
PL164715(B1)
申请公布日期
1994.10.31
申请号
PL19910290848
申请日期
1991.06.28
申请人
INSTYTUT FIZYKI PAN
发明人
JUREK MAREK;FRONC KRZYSZTOF
分类号
B26D1/547;B26F3/12;H01L21/304;(IPC1-7):H01L21/304
主分类号
B26D1/547
代理机构
代理人
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地址
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