| 摘要 |
A laser beam emitted by a laser light source 1 is scanned in a series of small, high-speed oscillations in a first scanning direction by an acousto-optical deflector 4, and scanned at a lower frequency in a second direction perpendicular to the first scanning direction by a vibration mirror galvanometer 8M, and scanned at yet a lower frequency in a third direction, parallel to the first direction, by a mirror galvanometer 11M, in order to enable high-precision scanning, and is projected onto a specimen 15. Light reflected or transmitted by the specimen 15 passes, via the mirror two galvanometers 11M and 8M and the AOD 4, through a confocal aperture 24 and is converted to an electrical signal by a photosensor 26. The signal is then converted to a standard television line format by a signal processor 27. <IMAGE> |
