摘要 |
PURPOSE:To facilitate the manufacture of a color filter substrate executed by laser beam machining, and to realize a high numerical aperture and a high yield by forming a specific laser protective layer on the substrate in advance. CONSTITUTION:On a translucent substrate 1, a color filter layer 2 of RGB-BL is provided, and on its layer 2, a flattening layer 3 consisting of a resin for flattening the upper face of a filter is provided, and on it flattening layer 3, a protective layer 4 to a laser light is provided, and also, on this protective layer 4, a transparent conductive layer 5 is provided. In this case, as for the layer 4 which becomes the base of the transparent conductive layer 5 to be worked, it is desired to be a substance having higher heat resistance than that of the transparent conductive layer 5. Also, since the machining utilizes light, not only a problem of a temperature, but also an absorption factor of light becomes a problem. That is, in the case where an absorption factor of wavelength of a laser light of the layer 4, which becomes the base is large, the layer 4 of the base is machined by the laser light after the transparent conductive layer is machined. Therefore, the substance whose absorption factor is small, and whose reflection factor is large against wavelength of the laser light. |