发明名称
摘要 PURPOSE:To output a stable projection light beam by associating a couple of support arms with each other by controlling and driving guides of an incident light side and a projection light side, and varying the Bragg angles of 1st and 2nd monochromatic crystal bodies relatively. CONSTITUTION:The incident light 10 from a light source is diffracted through the 1st and 2nd monochromatic crystal bodies 11 and 12 and made monochromatic to desired wavelength, and then outputted as a projection beam 13 at a parallel position as specified. Further, the Bragg angle theta of the crystal bodies 11 and 12 is varied and controlled in common on the optical axes of the projection light 10 and projection light beam 13 through the associative operation system of the support arms 21 and 31 by controlling and driving the guides 14 and 15 of the incident light side and projection light side by a pulse motor in mutually opposite directions as shown by arrows 16 and 17. Therefore, the invariably stable projection light beam is outputted.
申请公布号 JPH0679080(B2) 申请公布日期 1994.10.05
申请号 JP19880308083 申请日期 1988.12.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 KAMON KAZUYA
分类号 G21K1/06;H01L21/027;(IPC1-7):G21K1/06 主分类号 G21K1/06
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