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经营范围
发明名称
COMBUSTION DEVICE
摘要
申请公布号
JPH06267932(A)
申请公布日期
1994.09.22
申请号
JP19930053699
申请日期
1993.03.15
申请人
TOKYO ELECTRON TOHOKU LTD
发明人
AKIMOTO KAZUO
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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