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发明名称
MANUFACTURE OF BI-MOS
摘要
申请公布号
JPH06268160(A)
申请公布日期
1994.09.22
申请号
JP19930053867
申请日期
1993.03.15
申请人
OKI ELECTRIC IND CO LTD
发明人
KURODA SHUNICHI;KIMURA TATSUYA
分类号
H01L21/8249;H01L21/331;H01L27/06;H01L29/73;H01L29/732;(IPC1-7):H01L27/06
主分类号
H01L21/8249
代理机构
代理人
主权项
地址
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