Apparatus for producing semiconductors by vapour phase deposition.,申请号EP19900302831-传众专利搜索

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发明名称	Apparatus for producing semiconductors by vapour phase deposition.
摘要
申请公布号	EP0396239(B1)	申请公布日期	1994.09.14
申请号	EP19900302831	申请日期	1990.03.16
申请人	DAIDOUSANSO CO., LTD.	发明人	YOSHINO, AKIRA;OHMORI, YOSHINORI;OKUMURA, KENJI;OHNISHI, TOSHIHARU
分类号	C23C16/44;C23C16/455;C30B25/14;(IPC1-7):C30B25/14	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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