| 摘要 |
PURPOSE:To prevent the hunting of a laser beam in the titled device having a laser light source, optical systems for beam shaping, scanning and observing system and stage for holding a sample while heating the same by providing a heat shielding plate between the optical system for scanning and the sample surface. CONSTITUTION:The laser beam emitted from the laser light source 1 is shaped to a desired shape by the optical system 2 for beam shaping and is then conducted to the optical system 3 for scanning, by which the laser beam is condensed and irradiated on the sample 6. The sample 6 is held on the stage 7 in which a heater 8 is incorporated. The temp. of the sample is controlled by a controller 9. The air between the optical system 43 and the sample 6 is warmed by the radiation heat from the sample surface if the heating temp. thereof is high. Then a fluctuation arises and the locus of the beam on the sample surface hunts. The image plane of a TV monitor 5 which displays the sample working surface by the optical system 4 for observation fluctuates. The heat shielding plate 12 is thereupon provided between the optical system 3 and the sample 6 and the air or gaseous N2 15 is blown from a nozzle 13 in the upper part of the plate to said plate so that the plate is cooled. |
