发明名称
摘要 <p>PURPOSE:To maintain the excellent flatness of a masking material holding thin film, by providing a groove in the surface of a holding master piece to which the holding thin film is bonded. CONSTITUTION:A masking material 1 is provided on one surface of a holding thin film 2 in a desired pattern. A groove 3c is provided on the surface 3b of the marginal section of a holding master piece 3, which is on the outside of the uppermost flat surface 3a of the master piece 3 and intersects the flat surface 3a with an angle and to which the holding thin film 2 is bonded. When the groove 3c is provided, an adhesive 4 drops down into the groove 3c before it is spread over the uppermost flat surface 3a. Therefore, the adhesive is not spread to the flat surface 3a and the flatness of the holding think film 2 is kept excellent.</p>
申请公布号 JPH0650719(B2) 申请公布日期 1994.06.29
申请号 JP19850065469 申请日期 1985.03.29
申请人 发明人
分类号 G03F1/00;G03F1/22;G03F1/60;H01L21/027;H01L21/30 主分类号 G03F1/00
代理机构 代理人
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