Methode zum Ätzen von Spiegelfacetten an III-V-Halbleiterstrukturen.,申请号DE19883886751T-传众专利搜索

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发明名称	Methode zum Ätzen von Spiegelfacetten an III-V-Halbleiterstrukturen.
摘要
申请公布号	DE3886751(T2)	申请公布日期	1994.06.23
申请号	DE19883886751T	申请日期	1988.09.12
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y.	发明人	BUCHMANN, PETER, DR., CH-8135 LANGNAU AM ALBIS;DIETRICH, HANS-PETER, CH-8134 ADLISWIL;VETTIGER, PETER, CH-8135 LANGNAU AM ALBIS
分类号	H01L21/302;G03F7/00;H01L21/3065;H01L21/308;H01S3/08;H01S5/00;H01S5/02;H01S5/028;H01S5/10;(IPC1-7):H01L21/306;G03F7/004;H01L21/00	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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