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发明名称
Verfahren und Vorrichtung zur Trocknung von Gegenständen.
摘要
申请公布号
DE68910825(T2)
申请公布日期
1994.05.19
申请号
DE19896010825T
申请日期
1989.09.15
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y.
发明人
SYKORA, JUERGEN, D-6538 MUENSTER-SARMSHEIM
分类号
B01D1/16;F26B5/04;F26B21/12;H01L21/00;H01L21/304;(IPC1-7):F26B5/04
主分类号
B01D1/16
代理机构
代理人
主权项
地址
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