| 摘要 |
PURPOSE:To obtain a method for recognizing a circuit substrate which can obtain the position data of a circuit substrate regardless of the base of the circuit substrate and the material of a recognition pattern, etc. CONSTITUTION:The step between a base 4 of a circuit substrate 2 and a circuit pattern 3 and a recognition mark 5a, etc., is detected by the use of a laser type displacement meter 6 and position data on the circuit substrate 2 is calculated based on the position data. |
