Arc extinction device for vacuum substrate coating device - uses capacitor across anode and cathode DC supply leads providing diversion path

摘要

The arc extinction system uses a capacitor (13) connected across the anode (6) and cathode (5) of the substrate coating device (1), contained within a vacuum chamber (2) and coupled to a DC source (11). The capacitor has a capacitance which receives the energy upon a short-circuit between the DC supply leads (9,10) to inhibit an arc path (16). Pref. the capacitance of the capacitor cooperates with the inductance of the arc path and the supply leads to provide an oscillation circuit with an oscillation duration which is twice the time required for formation of an arc. ADVANTAGE - Simple device for arc free operation of vacuum sputtering substrate coating device.