| 摘要 |
PURPOSE: To provide a patterning method of photo-setting dielectric layer which has a high resolution of a developed pattern, and a photosetting layer is prevented from being damaged during pattern processing and further processings are achieved even under the existence of indoor light. CONSTITUTION: A second layer is formed on a photo-setting first layer including a dielectric solid fraction and an inorganic binder, in the second layer a pattern being formed with an agent for preventing chemical rays from transmitting. The second layer is used as an optical tool to pattern the first layer and remove the second layer, and then a patterned photo-set part is dried, and then calcined to sinter the dielectric solid fraction and the inorganic binder. |
