Prodn. of temp.-dependent electrical element - comprises depositing electrically active layer in gas phase onto substrate

摘要

Prodn. of temp.-dependent electrical constriction element comprises depositing electrically active layer (2) in the gas phase onto the substrate (1). MgO, esp. MgO single crystal, is used as the substrate material, more esp. TiMg2O4, Mn, Ni, Co, Ca, Cu, Fe, Ti, Mg, Zn, Pb or Zr can be used as the material for the electrically active layer (2). Inorganic cpds. or organometallic cpds. are used as starting material for the electrically active layer (2). ADVANTAGE - High deposition rate.