发明名称 STORING CASE AND METHOD FOR OPENING AND CLOSING ITS CAP
摘要 <p>PURPOSE:To provide a storing case capable of eliminating the difference between the inner pressure thereof and that of a connecting chamber upon uncapping, along with a method for opening and closing the cap. CONSTITUTION:A storing case 10 is provided with a storing case body 11 and a cap 13 and adapted to evacuate the inside of the storing case body 11 so as to hold the cap 13 on the case body by suction. The storing case 10 is provided with a vacuum measuring instrument 17 for measuring its inner pressure and with a contact connector 19, between which and the vacuum measuring instrument 17 a code 23 is connected. Upon measuring the inner pressure of the storing case 10, a contact terminal 27 is pressed from outside into contact with the contact connector 19. The storing case 10 is coupled with a connecting chamber at the cap mounting face, the inside of the connecting chamber is evacuated, the inner pressures of the storing case 10 and of the connecting chamber are measured simultaneously by the vacuum measuring instrument 17 and, when the difference between the two resulting values becomes zero or close to zero, the cap 13 is opened.</p>
申请公布号 JPH0632376(A) 申请公布日期 1994.02.08
申请号 JP19920326053 申请日期 1992.11.11
申请人 EBARA CORP 发明人 TAKEUCHI NORIYUKI;OMICHI TAKASHI;SHIBATA MIKI
分类号 B65D81/20;B65D85/38;B65D85/86;H01L21/673;H01L21/68;H01L21/683;(IPC1-7):B65D81/20 主分类号 B65D81/20
代理机构 代理人
主权项
地址