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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH0621010(A)
申请公布日期
1994.01.28
申请号
JP19920197781
申请日期
1992.06.30
申请人
TOKYO ELECTRON LTD
发明人
TANAKA SUSUMU
分类号
C23C16/50;C23F4/00;H01L21/203;H01L21/302;H01L21/3065;H01L21/31;H05H1/34;H05H1/46;(IPC1-7):H01L21/302
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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