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发明名称
Semiconductor device having a side wall film and method of producing the same.
摘要
申请公布号
EP0317160(B1)
申请公布日期
1994.01.19
申请号
EP19880310521
申请日期
1988.11.09
申请人
FUJITSU LIMITED
发明人
EMA, TAIJI
分类号
H01L21/3205;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L21/00;H01L21/82;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
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地址
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