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发明名称
FORMATION OF CONTACT HOLE
摘要
申请公布号
JPH05347361(A)
申请公布日期
1993.12.27
申请号
JP19920179004
申请日期
1992.06.12
申请人
SONY CORP
发明人
HIRAYAMA TERUMINE
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/768;H01L23/522;(IPC1-7):H01L21/90
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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