| 摘要 |
PURPOSE:To obtain the composition superior in various performances, such as resolution, profile, and sensitivity by using phenols containing a specified compound. CONSTITUTION:This composition comprises the alkali-soluble resin obtained by condensing the phenols containing the composed represented by formula with an aldehyde, such as formaldehyde, paraform-aldehyde, or acetaldehyde, in the presence of an acid catalyst and a dissolution-hindering agent, such as a compound having a enzene ring substituted by t-butoxycarbonyloxy group, and an acid generating agent. In the formula each of R1-R9 is, independently, H, optionally substituted straight or branched alkyl or alkenyl, hydroxy, or optionally substituted alkylcarbonyl, and at least one of them is hydroxy and at least 2 H in the o- or p-position to the hydroxy group. |
