| 摘要 |
A chemical sensitive semiconductor (CSSD) device includes essentially a capacitor structure (2, 13, 14, 4, 15) defined by a semiconductor (2) and a medium (15) sensitive to a chemical parameter (pH, redox couple, etc.) to be measured. The capacitance value of the capacitor structure identifies the value of the parameter. The semiconductor (2) is made insensitive to the chemical parameter e.g. by silicon oxide and silicon nitride coverings (13,14). The sensitive medium (15) is constituted e.g. by a platinum electrode, which interacts with the electrolytic solution (14). The sensitive medium (15) is kept in a position remote from the semiconductor (2). The preferred application is to equipment for chemical analysis, possibly with partial disposability characteristics. <IMAGE> <IMAGE> |
