| 摘要 |
PURPOSE:To decrease the number of layers in a SOG film and to improve the reliability of a color filter. CONSTITUTION:The production of a color filter consists of the following processes. First, a color layer material film 2 in which a dye is dissolved, polyvinyl alcohol(PVA) film 3A and photoresist film 4 are successively formed on a substrate 1. The photoresist film 4 is exposed in a specified part through a mask and developed. The developed photoresist film 4 is used as a mask to etch the PVA film 3A and color layer material film 2. Then the photoresist film 4 is peeled and the PVA film 3A is peeled by water rinsing. A separation film 6 to separate each color material films is formed on the substrate, and then these processes are repeated. Preferably, development is performed by using an org. developer. |
