| 摘要 |
<p>PURPOSE:To form a pattern making a best use of an advantage of the phase shift technique. CONSTITUTION:In the phase shift mask for forming an island pattern, the phase shift part is arranged so that the light of the same phase is transmitted in one direction of the mask pattern array and the light with an alternately changing phase is transmitted in the other direction of the array, and the light of the same phase is emitted in one direction of the mask array and the light with an alternately changing phase is emitted in the other direction of the array. Thus, even in forming a pattern consisting of array of island pattern, an effective phase shifting technic can be used and be made the most of use.</p> |
