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发明名称
METHOD AND DEVICE FOR LIQUID-PHASE CVD
摘要
申请公布号
JPH05302170(A)
申请公布日期
1993.11.16
申请号
JP19920134304
申请日期
1992.04.27
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
C23C16/44;C23C16/40;C23C16/455;C30B23/08;H01L21/31;H01L21/316;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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