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发明名称
Hochvakuum-Beschichtungsanlage
摘要
申请公布号
DE4209334(A1)
申请公布日期
1993.09.30
申请号
DE19924209334
申请日期
1992.03.23
申请人
LEYBOLD AG, 63450 HANAU, DE
发明人
HORNUNG, MARTIN, 8751 MOEMLINGEN, DE
分类号
C23C14/26;(IPC1-7):C23C14/24;H01F27/06
主分类号
C23C14/26
代理机构
代理人
主权项
地址
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