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发明名称
SPUTTERING PROCESS AND APPARATUS
摘要
申请公布号
JPH05214522(A)
申请公布日期
1993.08.24
申请号
JP19920272094
申请日期
1992.10.12
申请人
BOC GROUP PLC:THE
发明人
MAIKERU TOUWAITESU
分类号
C23C14/35;C23C14/34;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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