| 摘要 |
<p>PURPOSE:To provide a static pressure air bearing which prevents change of a bearing gap due to fluctuation of assembling precision or mechanical precision of the bearing or positional change caused by movement of the bearing. CONSTITUTION:A bearing comprises static pressure pads 5a, 5b for jetting fluid to an opposite surface to keep a gap between those and the opposite surface by static pressure, bias magnets 12a, 12b which work in the directions to reduce the gap, and coils 13a, 13b for modulating magnetic fields of the bias magnets.</p> |
