| 摘要 |
PURPOSE:To enhance heat conductivity to make thermocompression bonding having a large bonding surface efficient and to improve yield at the time of electrode connection in compliance with high precision by including boron nitride and the like in silicone rubber. CONSTITUTION:Boron nitride powder is charged by a predetermined ratio in silicone rubber to enhance heat conductivity so as to improve uniform heating performance of a bonding surface at the time of thermocompression bonding. Glass cloth, as a reinforcement agent, is compounded to suppress elastic deformation of rubber at the time of thermocompression bonding in order to comply with high precision. Specific parts by weight of cerium oxide, as a heat resistance improvement agent, can be included and aluminum nitride powder can be charged for adjustment of heat conductivity. Accordingly, durability is increased, the thermocompression bonding can be efficiently performed in a short time, and yield at the time of electrode connection with high precision can be enhanced. |
