| 摘要 |
PURPOSE:To keep the scanning line of a beam of light constant even when a duplicated substrate having a warp or wedge is used and to improve cost in a resin layer duplicating method placing a weighting body on a substrate to diffuse a layer of a resin material. CONSTITUTION:A curable liquid resin material 14 is dripped on a horizontally arranged stamper having a predetermined shape formed on the predetermined area of the upper surface thereof and a substrate 15 is placed on the resin material 14 to diffuse the resin material 14 on the stamper 13 and, thereafter, the resin material 14 is cured to duplicate a resin layer. In this method, a weighting body 17 having a wt. capable of horizontally correcting the warp of the substrate 15 is placed on the substrate 15 when the substrate has a warp to diffuse the resin material 14 prior to curing the same. |
