MAGNETIC RECORDING MEDIUM AND PRODUCTION THEREOF AND APPARATUS FOR PRODUCING THE SAME

摘要

PURPOSE:To obtain the recording medium which is improved in the adhesion at the boundary between a lubricating film and a protective film and has excellent durability and weatherability and the process and apparatus for production of this medium. CONSTITUTION:The recording medium formed by continuously forming a chromium film 2, a magnetic recording film 3 and the protective film 4 on a disk substrate 1 and applying the lubricating film 5 thereon is used as a sample. The sample is held in a plasma forming chamber 22 and the surface thereof is irradiated with radicals (contg. fluorine and carbon) formed by plasma CVD of fluorine and carbon tetrafluoride. As a result, a radical reaction product layer 25 is formed at the boundary between the protective film and the lubircating film. The irradiated radicals act on the boundary between the lubricating film and the protective film, by which a chemical bond is generated between the lubricant components and the surface of the protective film and the splashing resistance of the lubricating film is improved.