发明名称 LAYERED SUPERLATTICE MATERIAL APPLICATIONS
摘要 An integrated circuit (36) includes a layered superlattice material (60, 60', 92) having formula (1), where A1, A2 ... Aj represent A-site elements (84) in a perovskite-like structure, S1, S2 ... Sk represent superlattice generator elements (87), B1, B2 ... Bl represent B-site elements (86) in a perovskite-like structure (94), Q represents an anion (88), the superscripts indicate the valences of the respective elements (84, 87, 86, 88) the subscripts indicate the number of atoms of the element in the unit cell (89), and at least w1 and y1 are non-zero. Some of these materials are extremely low fatigue ferroelectrics and are applied in non-volatile memories (36). Others are high dielectric constant materials that do not degrade or breakdown over long periods of use and are applied in volatile memories (36).
申请公布号 WO9312542(A1) 申请公布日期 1993.06.24
申请号 WO1992US10627 申请日期 1992.12.08
申请人 SYMETRIX CORPORATION 发明人 PAZ DE ARAUJO, CARLOS, A.;CUCHIARO, JOSEPH, D.;SCOTT, MICHAEL, C.;MCMILLAN, LARRY, D.
分类号 H01L21/8247;C23C18/12;C30B7/00;H01C7/10;H01L21/02;H01L21/314;H01L21/316;H01L21/822;H01L21/8242;H01L21/8246;H01L27/04;H01L27/10;H01L27/105;H01L27/108;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
代理机构 代理人
主权项
地址