发明名称 RESONANT MIRROR AND METHOD OF MANUFACTURE
摘要 A resonant mirror is disclosed which comprises a deflectable mirror (16) generally planar with the top surface of a substrate. The mirror is suspended adjacent the top surface by at least two supporting elements (20). At least one supporting element is displaced from an edge of the mirror. The supporting elements (20), being collinear, define an axis of rotation (24) about which the mirror may oscillate to steer incident light through an angle.
申请公布号 CA2084946(A1) 申请公布日期 1993.06.21
申请号 CA19922084946 申请日期 1992.12.09
申请人 NELSON, WILLIAM E. 发明人 NELSON, WILLIAM E.
分类号 G02B26/08;G02B26/10;H01S3/101;(IPC1-7):G02B26/00 主分类号 G02B26/08
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