HEAT TREATMENT APPARATUS,申请号JP19910329849-传众专利搜索

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发明名称	HEAT TREATMENT APPARATUS
摘要
申请公布号	JPH05144758(A)	申请公布日期	1993.06.11
申请号	JP19910329849	申请日期	1991.11.19
申请人	TOKYO ELECTRON SAGAMI LTD	发明人	OKASE WATARU
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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