MANUFACTURE OF OPTICAL CIRCUIT,申请号JP19910321526-传众专利搜索

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发明名称	MANUFACTURE OF OPTICAL CIRCUIT
摘要	PURPOSE:To realize waveguide type light amplifiers and lasers operating with high efficiency. CONSTITUTION:A mask 5 is made on a lower clad layer film 6 on a Si substrate 4. After that, soot 7 for undoped core layers is deposited and the mask 5 is removed. Then a glass film 8 for a core layer is made by turning it transparent. In addition, a mask 5a is made on the opposite side of the mask for the glass film 8. Then soot 9 for Er-doped core layers having composition different from that of the soot 7 for undoped core layers is deposited, and the mask 5a is removed. And an Er-doped core film is made by turning it transparent. Accordingly, two kinds of core films having different compositions are formed on the same substrate. Furthermore, a rectangular core part is processed by patterning and etching, and an upper clad layer film 12 is formed and the soots 7 and 9 are buried.
申请公布号	JPH05136491(A)	申请公布日期	1993.06.01
申请号	JP19910321526	申请日期	1991.11.11
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	HATTORI KUNINORI;KITAGAWA TAKESHI;HIBINO YOSHINORI;SHUDO KEIZO
分类号	G02B6/13;G02B6/12;G02F1/35;H01S3/06;H01S3/07;H01S3/094	主分类号	G02B6/13
代理机构		代理人
主权项
地址

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