| 摘要 |
Terpolymers of styrene, mono-iso-butyl maleate and mono-2-(n-butoxy)ethyl maleate wherein the ratio of styrene units to maleate units is in the range of about 1:1 to about 1.6:1 and the ratio of mono-iso-butyl maleate units to mono-2-(n-butoxy)ethyl maleate is in the range of about 3:2 to about 1:3. The terpolymers are useful as alkali soluble binders for photoresist compositions. |
