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发明名称
ETCH BACK DETECTION
摘要
申请公布号
EP0304729(B1)
申请公布日期
1993.03.17
申请号
EP19880113027
申请日期
1988.08.11
申请人
FAIRCHILD SEMICONDUCTOR CORPORATION
发明人
RILEY, PAUL E.;KULKARNI, VIVEK D.;CASTEL, EGIL D.
分类号
H01L21/302;C23F4/00;H01L21/3065;H01L21/3105;H01L21/3213;H01L21/66;H01L21/768
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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