发明名称 METHOD AND APPARATUS FOR PATTERNING AN IMAGING MEMBER
摘要 OF THE PREFERRED EMBODIMENT A device for patterning an imaging member (46) is provided. The device comprises a light source (24) which emits light rays (26). Light rays (26) pass through a collimator lens (28) to collimate the light rays (30). The light then strikes a spatial light modulator (32) which is controlled by a computer (40) to reflect the light (42). The light passes through an imaging lens (44) to magnify the pattern for striking imaging member (46). Imaging member (46) is thus patterned by changing modulator (32) by computer (40). TI-16345 14
申请公布号 CA2075026(A1) 申请公布日期 1993.02.09
申请号 CA19922075026 申请日期 1992.07.30
申请人 NELSON, WILLIAM E. 发明人 NELSON, WILLIAM E.
分类号 G03F7/20;H01L21/027;H01L21/30;H05K3/00;(IPC1-7):H05K3/06 主分类号 G03F7/20
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