摘要 |
PURPOSE:To concentrate effectively oxygen from air by introducing a polymeric organic compd. contg. fluorine and silicon as a monomer into low-temp. plasma due to glow discharge and forming an ultrathin film. CONSTITUTION:As the organic compds. contg. fluorine, the compds. obtained by thermodecomposing fluoroplastics at 650-800 deg.C are used. As the organic conpds. contg. silicon, the compds. contg. an unsaturated type functional group and having <=200 deg.C b.p. in the atmosphere are used. The composite membrane having an oxygen-permselective active layer is obtained by introducing these compds. into low-temp. plasma due to glow discharge and accumulating the polymerized ultrathin film on a high molecular bearing body. The number of fluorine atom and silicon atom is preferably changed in the range of (1:2)-(6:1) at the time of plasma polymerization. |