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发明名称
PATTERN INSPECTION METHOD
摘要
申请公布号
JPH04362784(A)
申请公布日期
1992.12.15
申请号
JP19910166299
申请日期
1991.06.10
申请人
RICOH CO LTD
发明人
YAMANO MASAKAZU
分类号
G06F15/16;G06F15/177;G06F17/50
主分类号
G06F15/16
代理机构
代理人
主权项
地址
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