SURFACE-TREATMENT DEVICE,申请号JP19910118323-传众专利搜索

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发明名称	SURFACE-TREATMENT DEVICE
摘要
申请公布号	JPH04346226(A)	申请公布日期	1992.12.02
申请号	JP19910118323	申请日期	1991.05.23
申请人	HITACHI LTD	发明人	ONO TETSUO;SUZUKI KEIZO;MIZUTANI TATSUMI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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