| 摘要 |
PURPOSE:To provide the process for producing the waveguide type optical device interposed with optical multilayered films which can decrease light losses. CONSTITUTION:The optical multilayered films 34 are formed on the end face of a substrate 32 consisting of a specific material and this substrate 32 is imposed on a waveguide substrate 30. While the substrate 32 part is masked, a waveguide layer 40 is deposited at a prescribed thickness on the waveguide substrate 30 and only the substrate 32 is dissolved in a specific soln. to form a recess 42 in the part where the substrate 32 is removed. The waveguide layer 40 is deposited at a prescribed thickness only in the recess 42 and after the optical waveguide is patterned so as to include the optical multilayered films 34 by etching, a clad layer 46 is deposited over the entire part. |
