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发明名称
PLASMA DEPOSITION AND ETCHING OF SUBSTRATES.
摘要
申请公布号
GB2255855(A)
申请公布日期
1992.11.18
申请号
GB19920006249
申请日期
1992.03.23
申请人
* INTEGRATED PLASMA LIMITED
发明人
STEPHEN * BROWN
分类号
H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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