| 摘要 |
PURPOSE:To obtain the title cushion sheet, capable of eliminating the generation of fusion adhesion as well as deformation after baking and reducing the variability in the shrinkage factor thereof, by a method wherein specified starting material for forming piezoelectric ceramic is added with zirconia ceramic powder with a specified rate. CONSTITUTION:A cushion sheet, on which a thin sheet type piezoelectric ceramic form is put directly, is employed for the manufacture of the piezoelectric ceramic used for ultrasonic oscillator, actuator, ultrasonic motor and the like while the piezoelectric ceramic form is baked under a condition that it is put on the cushion sheet. The cushion sheet is formed by a method wherein starting material, blended so that the rate of oxide containing lead, zirconium, titanium or the composite of these substances becomes Pb(ZrxTi1-x)O3 (here; 0.6<=x<=0.8), is added with 3-20wt.% of zirconia ceramic powder and baked. According to this method, the generation of reaction between the cushion sheet and the baked body can be prevented while the separatability of the baked body can be improved. |
